Transition Metal Ion Implantation for Modification of Cathodic Interfaces
نویسندگان
چکیده
منابع مشابه
Plasma-based ion implantation utilising a cathodic arc plasma
Plasma-based ion implantation (PBII) is usually carried out with isotropic gaseous plasmas, such as a discharge in nitrogen. More recently, it has been applied using drifting plasmas, such as those produced by cathodic arcs, in order to allow efficient implantation of metallic species. The condensable nature of a cathodic arc plasma allows for the deposition of ion-stitched thin film coatings, ...
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ژورنال
عنوان ژورنال: ECS Proceedings Volumes
سال: 1997
ISSN: 0161-6374,2576-1579
DOI: 10.1149/199740.0451pv